Peripheral Equipment Vacuum Prober System
The birth of a new vacuum system in response to customer needs!
Our company designs, manufactures, and sells a new vacuum system, the "Peripheral Equipment Vacuum Prober System," in response to customer needs. 【Features】 ○ The vacuum chamber has a larger design with internal dimensions of φ150 (inner diameter) x 90 mm (height), allowing for cooling and heating mechanisms, as well as adaptability for research purposes. ○ Main body dimensions: 420 mm (width) x 420 mm (depth) x 545 mm (height) ○ Chamber internal dimensions: φ150 (inner diameter) x 90 mm (height) ○ Aluminum door: Viewing window (effective visible diameter: Φ96 mm) ○ External feedthrough ports (NW40): 3 ports ○ Vacuum exhaust port (NW40): 1 port ○ Probe movement mechanism: X-Y-Z stage with a movement range of ±5 mm, with a graduated moving seal section and vacuum bellows ○ Probe tip fixture: Capable of tilting at the tip (screw-fixed) ○ Probe: Tungsten needle (tip 25 μm) ○ Sample stage dimensions: φ70 mm grounded type ○ Maximum substrate: 30 mm ○ High vacuum valve: NW40 angle valve
- Company：エイエルエステクノロジー
- Price：Other
